ALIO offers an extensive range of off-the-shelf products — including Hexapod robotic systems, air bearing systems, and linear and rotary nano-precision systems (with both mechanical and air bearings guides). They also customize solutions, using their expertise and experience to create innovative cutting-edge motion control systems for your specific applications.

ALIO Product Solutions


ALIO’s patented next generation Hybrid Hexapod® takes a different approach to traditional 6 Degree of Freedom (6-DOF) positioning devices, and exhibits much higher performance at extremely competitive prices. The Hybrid Hexapod® combines a precision XY monolithic stage, tripod, and continuous rotation theta-Z axis. This renders traditional hexapod kinematics obsolete, with orders-of-magnitude improvements in precision, path performance, speed, stiffness and a larger work envelope with virtually unlimited XY travel, and fully programmable tool-center point locations.

The Hybrid Hexapod® has less than 100 nm 3-Dimensional 6 axis Point Precision® repeatability, making it an essential technology for mission critical applications in the laser processing, optical inspection, photonics, semiconductor, metrology, and medical device sectors, and indeed all micro-machining projects.

rotary system

ALIO Industries has also developed TRUE NANO® precision rotary stages to meet and exceed today’s demand for high precision rotary motion. ALIO’s line of rotary stages continues to expand as the company works with each individual customer on a one-to-one basis to provide customized motion control solutions perfectly aligned to the specifics of particular applications.

linear systems

ALIO’s linear motion products have been designed and manufactured to have no equal in terms of performance and reliability. These “mechanical” bearing stages can perform at a level of precision that alternative suppliers struggle to match with their “air” bearing stages. ALIO’s focus on 6-D Nano Precision® only — while others design and build to the 2-D world of planar repeatability and accuracy — keeps the company on the leading edge. All of the ALIO linear stage product families exhibit world class performance, component choice being dictated by the demands of exacting applications and cost sensitivity.

micron motion

ALIO has introduced its new Micron 2 (µII) motion systems family to compete in the micron-level motion control market, where the demand is for low-cost, mid-precision, reliable, long travel stages. As with all ALIO’s Micron 2 (µII) motion systems are designed using the company’s uncompromising standards of “quality first” thereby ensuring long-term reliable operation.

The Micron 2 (µII) recirculating ball rail bearing stages come as standard in sizes of 100mm up to 2 meter thus providing the end-user a solution for a large variety of applications. The Micron 2 (µII) motion systems family is a robust, powerful line that is designed to be used either stand-alone, or as a top axis of an integrated solution.

vertical motion stages

ALIO Industries’ Z-Lift motion platforms were created to address the unavoidable inaccuracies of Z-wedge vertical stages, as well as to reduce the footprint and improve performance of linear stages mounted in the vertical orientation. Every component in a motion stage adds to the total error. Since Z-wedges have a minimum of three machined components with complex angles, three sets of bearings, a motor via a coupling, and an encoder, the result is a very inaccurate stage. ALIO answers this with a family of very high accuracy, highly repeatable vertical stages.

air bearings

ALIO Industries has developed leading-edge 6-D Nano Positioning® air bearing motion systems for a wide range of applications in manufacturing, inspection/repair, and metrology. With several patented designs for Planar and Nano Z®, ALIO is well-positioned for the next generation application demands of TRUE NANO® precision in photovoltaic, semiconductor, ink jet deposition, lithography, and optical inspection applications.


ALIO Gantry Robots consist of a manipulator mounted onto an overhead system and allows movement across a horizontal plane. Gantry robots are also called linear or cartesian robots and are typically large systems built with linear guide rails that undertake pick and place actions, and they can also be used in applications such as welding. Cartesian gantries are relatively simple to program when compared to alternative motion control solutions, and in addition, they are not limited by floor space constraints. ALIO’s cartesian gantries are characterized by large work areas and superior positioning accuracy.

ALIO Videos

Hybrid Hexapod
Compact Precision XYZ
Vertical Mounted XY Stage